報(bào)告簡(jiǎn)介：基于深層瞬態(tài)光譜學(xué)的Al/Ti 4H-SiC肖特基結(jié)構(gòu)缺陷研究 Investigation of Defect Levels of Al/Ti 4H-SiC Schottky Structures byDeep Level Transient Spectroscopy何亞偉 中國科學(xué)院半導(dǎo)體研究所 HE Yawei Institute of Semiconductors, Chinese Academy of Sciences